Summary
PMMA and ZEP520 are the most popular positive E-beam resists with high resolution capability. ZEP520 is well-known for high sensitivity and etch durability but is expensive. Note that The resist performance, contrast, sensitivity and resolution depends strongly on the development process.
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There are two popular positive E-beam resists. ZEP520 is very expensive compared to PMMA
Check the spin curves of the E-beam resist you use. Your desired resist thickness will give the spin speed
The resist performance, contrast, sensitivity and resolution depends strongly on the development process. It is suggested to understand the different developers for PMMA and ZEP520.
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