Summary How to ensure the dose accuracy of the plasma doping or PIII system. What algorithm does the dose controller use to integrate Faraday currents?. How to … [Read more...] about How to monitor plasma ion implantation process for fault detection?
plasma doping dosimetry
Implant pulse parameters to monitor plasma ion implantation systems for fault detection and process control
Summary A method to monitor the plasma doping process quality is to analyze the implant pulses like DC voltage, current and Faraday current waveforms that are … [Read more...] about Implant pulse parameters to monitor plasma ion implantation systems for fault detection and process control
Dose accuracy in plasma doping
Summary Unlike Beamline, accurate dose measurement is a big challenge for plasma immersion doping. The simple integration of the faraday current can't accurately … [Read more...] about Dose accuracy in plasma doping