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Home / Archives for Comics / Nanotechnology / E-beam lithography

E-beam lithography

Things to know before doing E-Beam lithography at Harvard CNS: Ep2

November 10, 2018 By sky Leave a Comment

Summary In electron beam lithography, any larger pattern than a writing field is subdivided into multiple writing fields. If writing field alignment isn't … [Read more...] about Things to know before doing E-Beam lithography at Harvard CNS: Ep2

Filed Under: Comics, E-beam lithography, Nanotechnology Tagged With: Electron beam lithography, Harvard CNS, nanofabrication

Things to know before doing E-Beam lithography at Harvard CNS: Ep1

October 29, 2018 By sky Leave a Comment

Summary This comic explains what you need to know before doing electron beam lithography with Elionix systems at Harvard CNS: system, beam spot size, shot pitch, … [Read more...] about Things to know before doing E-Beam lithography at Harvard CNS: Ep1

Filed Under: Comics, E-beam lithography, Lithography, nanofabrication, Nanotechnology Tagged With: E-Beam lithography, Harvard CNS, nanofabrication

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