Summary In electron beam lithography, any larger pattern than a writing field is subdivided into multiple writing fields. If writing field alignment isn't … [Read more...] about Things to know before doing E-Beam lithography at Harvard CNS: Ep2
E-beam lithography
Things to know before doing E-Beam lithography at Harvard CNS: Ep1
Summary This comic explains what you need to know before doing electron beam lithography with Elionix systems at Harvard CNS: system, beam spot size, shot pitch, … [Read more...] about Things to know before doing E-Beam lithography at Harvard CNS: Ep1