Summary High resolution micro-uniformity map of ion beam angle is valuable to monitor beam quality control performance of an ion implanter. It provides details … [Read more...] about Ion beam angle uniformity wafer mapping using TW V-curves: Ep2
Beam angle control
Ion beam angle uniformity wafer mapping using TW V-curves: Ep1
Summary Thermal Wave(TW) technique can be used to monitor the micro-uniformity beam angle performance in ion implantation. Let's start with TW measurement … [Read more...] about Ion beam angle uniformity wafer mapping using TW V-curves: Ep1
Test Structures to measure the Implant Beam Angle for accurate beam control
Summary Beam angle information from nanoscale electrical test structure can provide high resolution wafer maps of the horizontal and vertical incident beam angle … [Read more...] about Test Structures to measure the Implant Beam Angle for accurate beam control