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Home / Comics / Conformal Doping Test Structure for PLAD process qualification

Conformal Doping Test Structure for PLAD process qualification

February 1, 2017 By sky Leave a Comment

Summary

Test structure method to probe doping conformality enables the automated measurement of nano-scale sidewall electrical depth profile and provides a wafer map on the degree of sidewall conformal doping.

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Filed Under: Comics, Conformal doping, Implantation, Nanotechnology Tagged With: confomal doping, plad, plasma doping, test structure

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