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Electrical measurements to characterize semiconductor devices, processes, and reliability using Agilent 4156C parametric analyzers

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Summary

Semiconductor parameter analyzers have a wide range of electrical measurement capabilities and are used to characterize semiconductor devices, processes, and materials, and to text reliability in the semiconductor industry. Profound knowledge about an analyzer is helpful to accelerate research and development.
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Channels of the parameter analyzer 4156C
P1 Semiconductor parameter analyzers are all-in-one tools used for electrical characterization of materials, semiconduc- tor devices and processes. The analyzer is one of essential tools that process integration engineer must learn.
4156C parameter analyzer features-measurement types
P2 Agilent 4156C is equipped with 8 channels (four SMUs, two VS and two Vm channels) and can perform three types of measurements such as sweep, sampling and QS-CV measurement
Set up the channel connection on parameter analyzer 4156C
P3 An example how to execute Id-Vg measurement to extract the threshold voltage information
Threshold voltage measurement using agilent 4156C parameter analyzer
P4 Set up measurement parameters, display and user functions
Agilent 4156C interfacing software-Metrix ICS and EasyExperts
P5 Interfacing softwares like Metrics ICS and Easyexperts are used to control the parametric analyzer. Using a Pusle Generator Expander AC/DC stress test can be performed.
semiconductor_electrical_characterization_ep2-p6-electrical device parameters
P6 Semiconductor parameter analyzer, 4156C is capable of a wide range of DC IV/CV measurements for device and process characterization, reliability test, and failure analysis
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Reference

  1. "Agilent 4156C Programmer’s Guide"
  2. "Measuring MOSFET properties"
  3. 2017. Toshiba Memory Corporation. “Toshiba Memory Corporation Reliability Handbook.”
  4. "Metrics ICS software”
  5. "EasyEXPERT Software Users guide”
  6. Alan Doolittle. School of Electrical and Computer Engineering, Georgia Institute of Technology. “Semiconductor Device and Material Characterization”

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