Summary
This comics are intended to help in understanding the electrical on-wafer measurement for semiconductor device, process and reliability characterization. Better knowledge about device physics, a semiconductor parameter analyzer and test structures is required for accurate measurement results
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A toy for process integration engineer that is a semiconductor parameter analyzer
HP4145B is equipped with four SMUs. two VS and two Vm channels
An example how to execute Id-Vg measurement to extract the threshold voltage information
Need to understand test structures for device and process characterization
semiconductor parameter analyzer is capable of all kinds of DC I-V measurements for device and process characterization
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Reference
- HP4145B parameter analyzer
- David Rodriguez, COE, University of California; http://www.eet.bme.hu/~mizsei/Minell/CMOS_test-structures.pdf, “Electrical testing of a CMOS baseline process”
- M. Bhushan, M.B. Ketchen, Microelectronic Test Structures for CMOS Technology
- 2017. Toshiba Memory Corporation. “Toshiba Memory Corporation Reliability Handbook.”
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