Summary High resolution micro-uniformity map of ion beam angle is valuable to monitor beam quality control performance of an ion implanter. It provides details … [Read more...] about Ion beam angle uniformity wafer mapping using TW V-curves: Ep2
beam angle measurement
Ion beam angle uniformity wafer mapping using TW V-curves: Ep1
Summary Thermal Wave(TW) technique can be used to monitor the micro-uniformity beam angle performance in ion implantation. Let's start with TW measurement … [Read more...] about Ion beam angle uniformity wafer mapping using TW V-curves: Ep1