Summary A custom-made probe wafer with RTD sensor provides wafer temperature spatial distribution map by measuring transient temperature distribution in a … [Read more...] about Mapping wafer temperature spatial distribution
cold implant
Implant damage control and junction leakage measurement
Summary Wafer temperature during implantation has a significant effect on the amorphous layer thickness and EOR damage that affects junction leakage current. … [Read more...] about Implant damage control and junction leakage measurement