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The Emergency – SC1 wet chemical clean induced yield drop

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Summary

Al contaminants introduced from the SC-1 solution are responsible for the threshold voltage shift and GOI degradation after thermal treatment.

failure analysis to resolve sc1 induced yield drop - P1
P1
failure analysis to resolve sc1 induced yield drop - P2
P2
failure analysis to resolve sc1 induced yield drop - P3
P3
failure analysis to resolve sc1 induced yield drop - P4
P4
Minority carrier lifetime degradation is caused by SC-1 induced metal contamination in silicon
failure analysis to resolve sc1 induced yield drop - P5
P5
failure analysis to resolve sc1 induced yield drop - P6
P6
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