Summary
A custom-made probe wafer with RTD sensor provides wafer temperature spatial distribution map by measuring transient temperature distribution in a silicon wafer. This can validate wafer temperature control for cold implantation.
Cryo implantation creates nonuniform wafer temperature distribution across a wafer. Based on Thermal-Wave(TW) contour map it looks like that it is the spatial temperature gradient from the lowest temperature region that contacts cryo source
How to build a custom-made cheap 300mm temperature probe wafer with RTD sensors
Real-time wafer temperature of a number of RTD sensors is measured by using data acquisition. Analysis of heat transfer to map wafer temperatures visualizes the progress of heat transfer acrros a wafer
This method provides useful information on temperature differentials across a wafer and correlation with thermal wave map and results from a commercial probe wafer such as KLA-Tencor SensArray. Using the visualization software like AVIZO will provide many useful information when it converts 2D maps to 3D solid.
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