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semiconductor category
E-beam lithography-Ep4-thumnail-1
Things to know before E-beam litho at Harvard CNS-Ep2

E-beam lithography basics-Ep2: Minimizing stitching errors

Elionix ELS-F125 Electron Beam Lithography System at Harvard CNS
Things to know before E-beam litho at Harvard CNS-Ep1

E-beam lithography basics:Ep1

High resolution ion beam angle uniformity wafer mapping in implantation by using thermal wave(TW) V-curves-thumnail3
How to veryify ion beam angle accuracy

High resolution micro-uniformity map of beam angle provides beam angle details
Ep.2

ion beam angle measurement using thermal wave-TW measurement theory-thumnail
Ion beam angle performance monitoring

How to create high resolution beam angle uniformity map
Ep.1

a thumnail about influence of wafer surface structure on plasma induced micro-arcing
Plasma doping induced arcing

The influence of surface structure and micro-arcing detection

plasma induced wafer arcing
Plasma wafer arcing

Test structure sensitivity to plasma induced wafer arcing

Monitoring plasma ion implantation systems for fault detection and process control-thumnail-3
How to monitor plasma doping process

High speed data acquisition and large data analysis

plasma-doping-dose-accuracy-thumnail2
Dose accuracy

Is dosimetry dose same as retained dose in plasma doping?

plasma doping advantages over beamline-thumnail-2
PLAD .vs Beamline

PLAD advantages over beamline

semiconductor_electrical_characterization_ep2-thumnail1
Electrical measurement

Electrical measurement with parameter analyzer used for device and process characterization

semiconductor device and process characterization with a parameter analyzer
DC-IV measurement

What is semiconductor parameter analyzer like 4156C that has a wide range of electrical measurement capabilities

E-Beam Lithography Resists (2)- 하버드대 CNS 나노팹에서 소자제조 – 3화-thumnail1
nanofabrication at harvard CNS-Ep3 (E-Beam resist(2)

Understand the characteristics of E-beam resists first for successful EBL

nanofabrication_at_havardcns-ep2-thumnail
Nanofabrication at harvard CNS-Ep.2 (E-beam resist)

Comparison of E-beam resists, Zep520A and PMMA

nanofabrication at Harvard CNS-Ep1(kr)
Nanofabrication at Harvard CNS-Ep1(Prototyping)

Getting ready

comics of "A Trip Down memory Lane"-featured image-3
A trip down memory lane -#3: DRAM vs. emerging memories

Ep3 (EN,KR): The resistance-based non-volatile memories(NVM), PCRAM, STT-MRAM and ReRAM are introduced to the memory heirarchy

comics of "A Trip Down memory Lane"-featured image-2
A trip down memory lane -#2: : The sorrow of DRAM scaling challenge

Ep2 (EN,KR): Can DRAM overcome its physical scaling limit and stay relevant?

comics of "A Trip Down memory Lane"-featured image-1
A trip down memory lane -#1: Memory to reduce latency gap

Ep1 (EN,KR): Processors and memory have always differed in priorities

comics about lithography-featured image
Lithography Trends

What has happened to force the lithography roadmap accelerate?

implant damage conrol-cold implantation
Implant damage control

Effect of cold and cluster implantation on junction leakage

beam angle measurement using test structures
Implant beam angle control

Test structure for beam angle measurement

Test structure method to probe doping conformality

Automated measurement of nano-scale sidewall electrical depth profile

Cold implantation wafer temperature uniformity

A custom-made probe wafer to map wafer temperature spatial distribution

implant damage control
SC1 wet clean effect

SC1 clean induced device yield drop

PLAD development
PLAD development

Key process issues with PLAD

Diadem
High speed data acquisition

In-situ monitoring for fault detection using NI-Diadem

semiconductor_electrical_characterization_ep2-thumnail1
Electrical measurement

semiconductor device and process characterization

3D capacitace-voltage curves
3D C-V technique

Visualization of slow traps of MOS

youtube video thumnail
How do you want be remembered? Ep1

Good people I still remember- A military doctor and Cellulitis-Korean army several decades ago

youtube video thumnail-people I thank
How do you want be remembered? Ep2

Good people I still remember- Boston ajeossi-the best buns and coffee-Korean army several decades ago

Laos travel story-lao skirt sinh - thumnail
Laos Skirt or Lao Sinh

Laos travel story about Laos traditional customs: Laos Skirt or Lao Sinh - Ep1:skyko comic animation

What is P-type?

What is P-type, intrinsic and extrinsic semiconductor?:semiconductor comic animation-Ep2

What is N-type?

What is N-type semiconductor? Semiconductor comics animation-Ep1

Sky Comics about Lao Sinh or Lao skirt-Ep1-thumnail
Lao skirt - Sihn: Ep1

Laos traditional custome-Sinh

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